Profilometer Instructions
Using the Profilometer
- The power should always be on, just turn up the contrast and brightness on the monitor.
- Use table down arrow key (on the right) and the knobs on the left to move the table to a position where you can get the wafer in. Place it on the paper on the tray.
- Press the table up arrow until see the pin tip on the screen. Once you see it, move it more slowly, especially once you see the the reflection of the pin tip on the wafer. It you do it too fast, the profilometer will lose track of the position and press too hard on the wafer before it backs off. You should see the pin tip hit the wafer then back off. If it sticks to the wafer, tap the up arrow button again.
- Use the knobs on the left of the table to move around to get to a feature you want to measure. You can also rotate the tray, because the pin tip only moves left-right.
- Press the ENT button to get to the menu system.
- Use the left/right arrows for the direction (-> or <-)
- Use the up/down arrows (I think it says "range") to choose the scanning parameters. The best one is probably the one with a range of about 2000 microns and gives you a time of about 8 seconds.
- Hit the START/STOP button to begin scanning. It will always start scanning a little bit in the opposite direction, then it goes in the correct direction. It stops scanning automatically, so pressing buttons will do you no good.
- After it finishes scanning, it will show you a plot. It skews things so that it starts and ends at zero, so you need to level the plot. First press the LEVEL button. Then you get two cursors (vertical lines at the the two ends of the plot). Press the CUR button between the left/right arrows to select either one or both of the cursors. The left and right arrows move the cursors. You want to place the cursors in two positions that should be at the same height (i.e. either side of a trace) then hit the PLOT button.
- You can read the difference in height and width of the cursors on the left.
- To get a print out, press the PRINT button.
- Remove the wafer and lower the contrast and brightness to minimum. Don't turn it off!
- There is a log book underneath, with more detailed instructions. It seems that noone ever signs the logbook.
pruitt@cdr.stanford.edu
allisono@cdr.stanford.edu