MicroStructures and Sensors Lab (MSSL)

Research on Fundamental Properties and Applications of MEMS-based MicroMechanical Devices.

• Micromechanical Sensors.

• Micromechanical Elements for Scientific and Technological Collaboration Partners.

• Devices and Instruments for Studies of Fundamental Properties of Micromechanical Structures.

Collaborators : IBM, JPL, NRL, SNL, SAIC, Medtronic, Raychem, Lucas, Seagate, Perkin-Elmer...

Students from :ME, EE, Appl Phys, A/A

2-Axis AFM Cantilevers for

Surface Friction Experiments and

Thermomechanical Data Storage

Piezoresistive

Lateral Accelerometer

Flow Visualization

in Microchannels

Ultrathin Cantilevers for

attoNewton Force Detection

Kenny

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